300,000 dust purification level
Air cleanliness level ISO14644-1 (international standard)
| Air cleanliness level(N) | Maximum concentration limit of particles greater than or equal to the marked particle size (number of air particles/m3) | |||||
| 0.1um | 0.2um | 0.3um | 0.5um | 1.0um | 5.0um | |
| ISO Class1 | 10 | 2 | ||||
| ISO Class2 | 100 | 24 | 10 | 4 | ||
| ISO Class3 | 1,000 | 237 | 102 | 35 | 8 | |
| ISO Class4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
| ISO Class5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| ISO Class6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO Class7 | 352,000 | 83,200 | 2,930 | |||
| ISO Class8 | 3,520,000 | 832,000 | 29,300 | |||
| ISO Class9 | 35,200,000 | 8,320,000 | 293,000 | |||
Approximate comparison table of cleanliness grades in various countries
| PCS/M≥0.5um | ISO
14644-1(1999) |
US
209E(1992) |
US
209D(1988) |
EEC
cGMP(1989) |
FRANCE
AFNOR(1981) |
GERMANY
VDI 2083(1990) |
JAPAN
JAOA(1989) |
| 1 | - | - | - | - | - | - | - |
| 3.5 | 2 | - | - | - | - | 0 | 2 |
| 10.0 | - | M1 | - | - | - | - | - |
| 35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
| 100 | - | M2 | - | - | - | - | - |
| 353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
| 1,000 | - | M3 | - | - | - | - | - |
| 3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
| 10,000 | - | M4 | - | - | - | - | - |
| 35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
| 100,000 | - | M5 | - | - | - | - | - |
| 353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
| 1,000,000 | - | M6 | - | - | - | - | - |
| 3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
| 10,000,000 | - | M7 | - | - | - | - | - |
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