In addition to the strict control of particles the electronic industry engineering cleanroom represented by clip production workshops, integrated circuit cleanrooms, and disk manufacturing workshops also has stricter requirements for temperature and humidity control, illumination (even light source requirements), and micro-vibrations, to eliminate the impact of strict electricity on the production of the product, so that the environment meets the production process requirements of electronic products in a clean environment.
The temperature and humidity of the cleanroom should be determined according to the production process requirements. When the production process has no specific requirements, the temperature can be 20~26℃ and the relative humidity can be 30%~70%. The temperature of the personnel purification room and the living room can be 16~28℃. According to the Chinese national standard GB-50073, which is in line with the international ISO mark, the cleanliness level of this type of cleanroom is 1-9, of which 1-5, the airflow pattern is unidirectional flow or mixed flow, and the wind speed is 0.2- 0.45m/s. The 6-stage airflow pattern is a non-unidirectional flow, air exchange frequency 50-60 times/h. The 7-stage airflow pattern is non-unidirectional, air exchange frequency 15-25 times/h. 8-9 The flow pattern of the stage airflow is non-unidirectional flow, and the air exchange frequency is 10-15 times/h.
According to the current regulations, the noise level (empty state) in the 10,000 class cleanroom of an electronic manufacturing plant, should not be greater than 65dB(A).
1. The vertical flow cleanroom fullness ratio of the cleanroom of the electronics manufacturing plant should not be less than 60%, and the horizontal unidirectional flow cleanroom should not be less than 40%, otherwise it will be a partial unidirectional flow
2. The static pressure difference between the cleanroom and the outside of the electronics factory should not be less than 10Pa, and the static pressure difference between the clean area and the non-clean area with different air cleanliness should not be less than 5Pa
3. The amount of fresh air in a Class 10,000 clean room in the electronics manufacturing industry should take the maximum of the following two items.
4. The sum of the amount of indoor exhaust air, and the amount of fresh air required to maintain the positive pressure value in the compensation room.
5. Ensure that the amount of fresh air per person per hour in the clean room is not less than 40 square meters.
Post time: Sep-09-2021