1. Air supply and exhaust volume: If it is a turbulent flow cleanroom, then the air supply and exhaust volume should be measured. If it is a one-way flow cleanroom, its wind speed should be measured.
2. Airflow control between areas: In order to prove the airflow direction between areas is correct, that is flow from clean area to the area with poor cleanliness, it is necessary to detect:
(1)The pressure difference between each area is correct.
(2)The airflow at the doorway or at the opening of wall and floor moves in the right direction, that is, from the clean area to the area with poor cleanliness.
3. Filter leak detection: The high-efficiency filter and its outer frame should be inspected to ensure that suspended pollutants will not pass through:
(1)The damaged filter
(2)The gap between the filter and its outer frame
(3)Other parts of the filter device penetrate into the room
4. Isolation leak detection: This test is to prove that suspended pollutants do not penetrate into the cleanroom through the building materials.
5. Indoor airflow control: The type of airflow control test depend on the airflow pattern of the cleanroom — whether it is turbulent or unidirectional. If the cleanroom airflow is turbulent, it must be verified that there are no areas of the room where airflow is insufficient. If it is a one-way flow cleanroom, it must be verified that the wind speed and direction of the entire room meet the design requirements.
6. Suspended particle concentration and microbial concentration: If these above tests meet the requirments, the particle concentration and microbial concentration (if necessary) are finally measured to verify that they meet technical conditions of the cleanroom design.
Post time: Jan-17-2022